Materials vacuum deposition techniques table

A  B  C  D  E  G  H  I  K  L  M  N  O  P  R  S  T  U  V  Y  Z


  • E-Beam Evaporation = PVD using electron beam to generate vapor
  • Thermal Evaporation = PVD using electric heater
  • PDC = Pulsed DC (Direct Current) sputtering
  • RF = RF(Radio Frequency) sputtering
  • RF-R = reactive RF (Radio Frequency) sputter
  • DC = DC (Direct Current)  sputtering
  • DC-R = reactive DC (Direct Current) sputtering
Symbols legend Thermal evaporation accessories materials
† : Magnetic material (requires special sputter source) C = carbon
‡:  One run only Gr = graphite
* : Influenced by composition Q = quartz
** :The z-ratio is unknown. Therefore, we recommend using 1.00 or an experimentally VitC = vitreous carbon
determined value. Please click here for instructions on how to determine this value.
***:  All metals alumina coated
S = sublimes D = decomposes
PDC = Pulsed DC sputtering       RF = RF sputtering is effective    RF-R = reactive RF sputter is effective   DC = DC sputtering is effective    DC-R = reactive DC sputtering is effective