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  • Rapid Thermal Processing(RTP): Pulse Mode

    Rapid Thermal Processing(RTP): Pulse Mode

    Pulsed Rapid Thermal Processing


  • PhotonExport at Riva 2022 XII Iberian Vacuum and Applications Conference

    PhotonExport at Riva 2022 XII Iberian Vacuum and Applications Conference

    The Riva 2022 of ASEVA (Spanish Vacuum Society) and SOPORVAC (Portuguese Vacuum) Society (SOPORVAC) that will be organized on May 16 and 17 in the city of Braga in Portugal. This event will present new and updated technologies related to plasma science, vacuum equipment, thin films of various materials and nanostructure, which are topics of … Read more


  • Atomic layer deposition (ALD): Basics

    Atomic layer deposition (ALD): Basics

    ALD is a special adaptation of chemical vapor deposition (CVD) technique pioneering in semiconductor production and suitable for manufacturing inorganic material layers with a thickness down to a fraction of monolayers A. M. Shevjakov Atomic layer deposition (ALD) has gained a lot of attention as a thin film deposition method, as it is uniquely suitable … Read more