Wet Processing Equipment – Batch Spray Systems

At PhotonExport, we understand the critical importance of precision, efficiency, and reliability in semiconductor manufacturing. That’s why we’re proud to distribute a select range of SHELLBACK’s SEMITOOL batch spray systems – a lineup designed to redefine the standards of semiconductor wet processing, in Spain and Portugal.

Featuring the SRD, SAT, SST, and ECO-Clean Tools, the equipment embodies innovation with Enhanced Spray Technology, offering you unparalleled performance and outcomes.

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  • Compact Design: Maximize your space with our equipment’s small footprint, designed to fit seamlessly into your manufacturing setup.
  • High Uptime: Benefit from equipment that’s built to keep running, minimizing downtime and maximizing productivity.
  • Low Cost of Ownership: Enjoy reduced operational costs without compromising on quality or performance, backed by extensive spare parts availability.

Batch Spray System Line up:

  1. SRD800 Spin Rinse Dryer: Experience advanced automation, intuitive interface, and SmartParts™ technology for improved uptime. Its high-performance chamber guarantees exceptional cleanliness.
  2. ECO-Clean Ozone Tool: Embrace cost efficiency with low chemical use and reduced DIW consumption, providing a faster and more affordable solution for photoresist strip and organic contamination removal.
  3. Spray Acid Tool (SAT) & Spray Solvent Tool (SST): With precise flow control and consistent wafer handling, these tools set new benchmarks in wet processing for semiconductor manufacturing.
Batch Spray System - SRD800
Spin Rinse Dyer, Easy installation and low maintenance. Image courtesy of SHELLBACK.

SEMITOOL SRD800 Spin Rinse Dryer (SRD) Batch Spray System

Revolutionary Cleaning and Drying Efficiency

The SRD800 series redefines the standard for semiconductor wet processing with its advanced automation, intuitive interface, and innovative SmartParts™ technology. Ensure fewer than 20 particle adders at 0.2um per 8” wafer for unparalleled substrate protection and cleanliness.

  • Optimized Chemical Use: Advanced control system with a 10.1” multi-touch graphical interface.
  • Cost-Effective Operation: Programmable N2 Purge Saver and ESD Wafer Protection features.
  • Enhanced User Experience: Ergonomic design for improved management and reduced cost.
  • High Performance Chamber: Ensures fewer than 20 particle adders at 0.2um per 8” wafer.
  • And much more!
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SEMITOOL TORRENT ECO-Clean Ozone Tool (SOT) Batch Spray System

Eco-Friendly and Cost-Efficient Cleaning Solution

The ECO-Clean SOT combines proven hardware with standard components for efficient and low chemical use. It’s a cost-efficient solution for photoresist strip, photo rework, and organic contamination removal.

  • Low Chemical Consumption: Zero to 7ml chemical consumption per run.
  • Award-Winning Ozone Process: Includes SC1, SC2, SPM, and HF replacement options and more.
  • Improved Cycle Times: Reduces cost per wafer while ensuring high efficiency.
  • Reductions in Ownership Costs: With minimal chemical and DIW consumption, low exhaust and facility requirements, reduced waste, lower cost per wafer, and improved cycle times.
  • And much more!
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TORRENT ECO-Clean, Batch Spray System
TORRENT ECO-Clean. Image courtesy of SHELLBACK.
Spray Acid Tool
Spray Acid Tool. Image courtesy of SHELLBACK.

SEMITOOL TORRENT Spray Acid Tool (SAT) Batch Spray System

Precision and Performance in Acid Processing

The SEMITOOL TORRENT SAT redefines wet processing standards with precise flow control nozzles and consistent wafer handling. Ideal for advanced packaging and optoelectronics.

  • High Throughput: Single or dual chamber configurations for 25 or 50 wafer loads.
  • Versatile Applications: Perfect for post-etch, pre-diffusion, and post-CMP cleans.
  • Smart Features: Ensures uniform, repeatable processes for superior cleaning efficiency.
  • Cost-effective operation: Benefit from low exhaust and facility requirements, minimal chemical and DIW consumption, and reduced waste, ensuring a cost-efficient ownership experience.
  • And much more!

Also available the SEMITOOL TORRENT Spray Solvent Tool (SST) Spray Batch System.

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Ready to Optimize Your Semiconductor Manufacturing with Batch Spray Systems?

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Request a quote or more information for your Spray Batch Systems today!

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