Zirconium Oxides

Zirconium Dioxide 

Available as pure zirconium dioxide ZrO2 (white), known as zirconia, or x oxygen deficient zirconium ZrO2-X (gray), powder or tablets. It can be found melt or in three phases : monoclinic, tetragonal and cubic.

Specifications

ShapeColorPurityPackageStorage
SinterTablet18x12 mm
24x14 mm
30x10 mm
8x5 mm,10x5 mm
12x8 mm, 39x14 mm
(dia.range: 8.42 mm)
White
Black
99.9%
99.99%
1 Kg/BagAvoid exposure to sunlight & acid
Keep dry
Cuboid piece15x15x10 mm
Granule1-3 mm; 3-5 mm

Characteristics of zirconium dioxide

CAS NumberDensity (g/cm3)Boiling point (Cº)Melting point (Cº)Refractive index at 550 (nm)Transparency range (µm)Evaporation source
1314-23-45.89/4.17
430027151.97-2.050.25-9E
ApplicationsMulti-layer coating: AR coating; Hard coating; Glass coating

Evaporation technique

The electron beam is used to melt the surface of a zirconium oxide tablet in a vacuum chamber, which evaporates. It evaporates from a Mo-liner Cu crucible. It only melts superficially and predominantly sublimates. The resulting zirconia vapors are then deposited on a thin film as a coating using the physical vapor deposition technique.

The zirconia tablet must be heated and melted uniformly and effectively by an electron beam to maintain its stability. The tablet’s vaporization and melting rate and stability are controlled by key operating beam parameters such as beam power, focus, scanning pattern, scanning frequency, and angle of incidence of the electron beam at the target tablet.

Zirconium Dioxide