sputtering targets

what are sputtering targets?

We offer quality, certified sputtering targets that have been manufactured using the latest improvements in Hot Isostatic Pressing and Vacuum Hot Pressing.

Our international partnerships with leading material transformers and cost effecive metallic powder suppliers allows us to offer the greatest variety of cathode sputtering targets for thin film deposition. You can combine the composition materials of pure metals, alloys and composites with sizes, shapes and degrees of purity to satisfy your thin film objectives. Circular, rectangular, triangular, flat, S-Guns electrode, or any other shape desired can be supplied to fit all leading manufacturer Physical Vapor Deposition systems, or your custom made bench top sputtering equipment.

The manufacturing process undergoes quality inspection in all stages. 100% of our targets go through a final composition, shape and size lab analysis. The Inspection & Analysis Certificate is shipped with the target.

Send us your sputtering target specification to get a quote, and we will get back to you in less than 24 hours.

 

Metals | Alloys | Superconducting Alloys | Antimonides | Arsenides | Borides | Carbides | Fluorides | Nitrides | Oxides | Selenides | Silicides | Sulfides | Tellurides |

Sputtering Targets Table

	Materials	Element / Composition	Purities
Metals
metals	ALUMINUM	Al	99.99- 99.9999%
metals	ANTIMONY	Sb	99.999- 99.99999%
metals	BARIUM	Ba	99.5%
metals	BERYLLIUM	Be	98- 99.9%
metals	BISMUTH	Bi	99.9, 99.999%
metals	CADMIUM	Cd	0.99999
metals	CARBON	C	0.99999
metals	CERIUM	Ce	99.9%
metals	CHROMIUM	Cr	99.95%
metals	COBALT	Co	99.9%
metals	COPPER	Cu	99.99, 99.999%
metals	GERMANIUM	Ge	0.99999
metals	GOLD	Au	99.99, 99.999%
metals	HAFNIUM	Hf	99.9%
metals	INDIUM	In	99.99- 99.9999%
metals	IRIDIUM	Ir	99.9%
metals	IRON	Fe	99.9 99.95%
metals	LEAD	Pb	0.99995
metals	MAGNESIUM	Mg	99.95%
metals	MANGANESE	Mn	99.9%
metals	MOLYBDENUM	Mo	99.95%
metals	NEODYMIUM	Nd	99.9%
metals	NICKEL	Ni	99.7, 99.995%
metals	NIOBIUM	Nb	99.95%
metals	PALLADIUM	Pd	99.95%
metals	PLATINUM	Pt	99.99%
metals	PRASEODYMIUM	Pr	99.9%
metals	RHENIUM	Re	99.9%
metals	RUBIDIUM	Rb	99.8%
metals	RUTHENIUM	Ru	99.9%
metals	SELENIUM	Se	99.999- 99.9999%
metals	SILICON	Si	0.99999
metals	SILVER	Ag	99.99%
metals	TANTALUM	Ta	99.95%
metals	TELLURIUM	Te	0.99999
metals	TIN	Sn	99.99%
metals	TITANIUM	Ti	99.7- 99.995%
metals	TUNGSTEN	W	99.95%
metals	VANADIUM	V	99.9%
metals	YTTERBIUM	Yb	99.9%
metals	YTTRIUM	Y	99.9%
metals	ZINC	Zn	99.99, 99.995%
metals	ZIRCONIUM	Zr	99.7%
Alloys
alloys	ALUMINUM - CHROMIUM	AlCr	99.99%
alloys	ALUMINUM - COBALT	AlCo	99.95%
alloys	ALUMINUM- COPPER	AlCu	99.9- 99.9999%
alloys	ALUMINUM - IRON	AlFe	99.99%
alloys	ALUMINUM MAGNESIUM	AlMg	0.99995
alloys	ALUMINUM SILICON	AlSi	99.9- 99.9999%
alloys	ALUMINUM SILICON COPPER	AlSiCu	99.9- 99.9999%
alloys	ALUMINUM SILVER	AlAg	0.9995
alloys	ALUMINUM - TITANIUM	AlTi	99.95%
alloys	CERIUM GADOLINIUM	GdCe	0.9995
alloys	CERIUM SAMARIUM	SmCe	0.9995
alloys	CHROMIUM SILICON	CrSi	0.9995
alloys	CHROMIUM/ SILICON MONOXIDE	Cr:SiO	99,5 to 99,9%
alloys	CHROMIUM - NICKEL	CrNi	99.9%
alloys	CHROMIUM - COBALT	CrCo	99.5% to 99.9%
alloys	CHROMIUM - COBALT - NICKEL	CrCoNi	99.5%
alloys	COBALT IRON	CoFe	99,9 to 99,95
alloys	COBALT - NICKEL	CoNi	99.5%
alloys	COBALT IRON BORON	CoFeB	0.9995
alloys	COPPER COBALT	CuCo	0.9995
alloys	COPPER GALLIUM	CuGa	99,99 to 99,995%
alloys	COPPER INDIUM	CoIn	0.9999
alloys	COPPER NICKEL	CoNi	0.9999
alloys	COPPER ZIRCONIUM	CoZr	0.9995
alloys	HAFNIUM IRON	HfFe	0.9995
alloys	INDIUM - TIN	InSn	99.99, 99.999%
alloys	IRON BORON	FeB	0.9995
alloys	IRON CARBON	FeC	0.999
alloys	IRON - NICKEL (PERMALLOY)	FeNi	99.9%
alloys	IRON MANGANESE	FeMn	0.9995
alloys	IRIDIUM MANGANESE	IrMn	0.9995
alloys	IRIDIUM RHENIUM	IrRe	0.9995
alloys	NICKEL ALUMINUM	NiAl	99,9 to 99,99%
alloys	NICKEL CHROMIUM	NiCr	99,9 to 99,95%
alloys	NICKEL CHROMIUM SILICON	NiCrSi	0.9995
alloys	NICKEL IRON	NiFe	0.9995
alloys	NICKEL NIOBIUM TITANIUM	NiNbTi	0.9995
alloys	NICKEL TITANIUM	NiTi	0.9995
alloys	NICKEL VANADIUM	NiVa	0.9995
alloys	SAMARIUM COBALT	SmCo	0.999
alloys	SILVER COPPER	AgCo	0.9999
alloys	SILVER TIN	AgSn	0.9999
alloys	TANTALUM ALUMINUM	TaAl	0.999
alloys	TERBIUM DYSPROSIUM IRON	TbDyFe	0.995
alloys	TERBIUM IRON	TbFe	0.9995
alloys	TITANIUM ALUMINUM	TiAl	99,9 to 99,99%
alloys	TITANIUM NICKEL	TiNi	0.9995
alloys	TITANIUM CHROMIUM	TiCr	0.9995
alloys	TUNGSTEN RHENIUM	WRe	0.9995
alloys	TUNGSTEN TITANIUM	W Ti	99,9 to 99,995
alloys	ZIRCONIUM ALUMINUM	ZrAl	0.9995
alloys	ZIRCONIUM IRON	ZrFe	0.9995
alloys	ZIRCONIUM NICKEL	ZrNi	0.9995
alloys	ZIRCONIUM NIOBIUM	ZrNb	0.9995
alloys	ZIRCONIUM TITANIUM	ZrTi	0.9995
alloys	ZIRCONIUM YTTRIUM	ZrY	0.9995
alloys	ZINC ALUMINUM	ZnAl	1
alloys	ZINC MAGNESIUM	ZnMg	0.9995
alloys	YTTRIUM - BARIUM COPPER OXIDE	2003-02-01 00:00:00	99.9- 99.999%
alloys	BISMUTH - CALCIUM - STRONTIUM - COPPER OXIDE	2-2-2-3	99.9- 99.999%
alloys	BISMUTH - LEAD - CALCIUM - STRONTIUM - COPPER OXIDE	1.94-0.06-2-2-3	99.9- 99.999%
alloys	THALLIUM - BARIUM - CALCIUM - COPPER OXIDE	2-2-2-3	99.9- 99.999%
alloys	ERBIUM - BARIUM - COPPER OXIDE	2003-02-01 00:00:00	99.9- 99.999%
Antimonides
antimonides	GALLIUM ANTIMONIDE	GaSb	99,99 to 99,999%
antimonides	INDIUM ANTIMONIDE	InSb	99.99%
Arsenides
arsenides	GALLIUM ARSENIDE	GaSb	0.99999
arsenides	INDIUM ARSENIDE	InAS	0.99999
Borides
borides	ALUMINUM BORIDE	AlB2	0.99
borides	CHROMIUM BORIDE	CrB2	99.5%
borides	HAFNIUM BORIDE	HfB2	99.5%
borides	IRON BORIDE	37288	99.5%
borides	LANTHANUM BORIDE	LaB6	99.5%
borides	MOLYBDENUM BORIDE	Mo2B5, MoB2	99.5%
borides	NIOBIUM BORIDE	NbB2	99.5%
borides	TANTALUM BORIDE	TaB2	99.5%
borides	TITANIUM BORIDE	TiB2	99.5%
borides	TUNGSTEN BORIDE	WB, W2B	99.5%
borides	VANADIUM BORIDE	VB2	99.5%
borides	ZIRCONIUM BORIDE	ZrB2	99.5%
Carbides
carbides	BORON CARBIDE	B4C	99.5%
carbides	CHROMIUM CARBIDE	Cr3C2	99.5%
carbides	HAFNIUM CARBIDE	HfC	99.5%
carbides	MOLYBDENUM CARBIDE	MoC	99.5%
carbides	NIOBIUM CARBIDE	NbC	99.5%
carbides	SILICON CARBIDE	SiC	99.5%
carbides	TANTALUM CARBIDE	TaC	99.5%
carbides	TITANIUM CARBIDE	TiC	99.5%
carbides	TUNGSTEN CARBIDE	WC	99.95%
carbides	VANADIUM CARBIDE	VC	99.5%
carbides	ZIRCONIUM CARBIDE	ZrC	99.5%
Fluorides
fluorides	ALUMINUM FLUORIDE	AlF3	99.5%
fluorides	BARIUM FLUORIDE	BaF2	99.9%
fluorides	CALCIUM FLUORIDE	CaF2	99.9%
fluorides	CERIUM FLUORIDE	CeF3	99.9%
fluorides	DYSPROSIUM FLUORIDE	DyF3	99.9%
fluorides	ERBIUM FLUORIDE	ErF3	99.9%
fluorides	LANTHANUM FLUORIDE	LaF3	99.9%
fluorides	LEAD FLUORIDE	PbF2	99.9%
fluorides	LITHIUM FLUORIDE	LiF	99.9%
fluorides	MAGNESIUM FLUORIDE	MgF2	99.9%
fluorides	NEODYMIUM FLUORIDE	NdF3	99.5%
fluorides	PRASEODYMIUM FLUORIDE	PrF3	99.5%
fluorides	SAMARIUM FLUORIDE	SmF3	99.5%
fluorides	SODIUM FLUORIDE	NaF	99.9%
fluorides	STRONTIUM FLUORIDE	SrF2	99.9%
fluorides	THORIUM FLUORIDE	ThF4	99.9%
fluorides	YTTRIUM FLUORIDE	YF3	99.9%
fluorides	YTTERBIUM FLUORIDE	YbF3	0.99995
Nitrides
nitrides	ALUMINUM NITRIDE	AlN	99.5%
nitrides	BORON NITRIDE	BN	99.5%
nitrides	HAFNIUM NITRIDE	HfN	99.5%
nitrides	NIOBIUM NITRIDE	NbN	99.5%
nitrides	SILICON NITRIDE	Si3N4	99.9%
nitrides	TANTALUM NITRIDE	TaN	99.5%
nitrides	TITANIUM NITRIDE	TiN	99.5%
nitrides	VANADIUM NITRIDE	VN	99.5%
nitrides	ZIRCONIUM NITRIDE	ZrN	99.5% to 99,98%
Oxides
oxides	ALUMINUM OXIDE	Al2O3	99.99%
oxides	ZINC OXIDE ALUMINA	ZnOAl2O3	99.99%
oxides	ANTIMONY OXIDE	Sb2O3	99.99%
oxides	ANTIMONY TIN DIOXIDE	Sb2O3 / SnO2	99.99%
oxides	BARIUM TITANATE	BaTiO3	99.9%
oxides	BERYLLIUM OXIDE	BeO	99.5%
oxides	BISMUTH OXIDE	Bi2O3	99.9%
oxides	BISMUTH TITANATE	Bi4TiO3	99.9%
oxides	CERIUM OXIDE	CeO2	99.99%
oxides	CHROMIUM OXIDE	Cr2O3	99.9%
oxides	DYSPROSIUM OXIDE	Dy2O3	99.9%
oxides	ERBIUM OXIDE	Er2O3	99.9%
oxides	EUROPIUM OXIDE	Eu2O3	99.5%
oxides	GADOLINIUM OXIDE	Gd2O3	0.999
oxides	GALLIUM OXIDE	Ga2O3	0.99999
oxides	GERMANIUM OXIDE	GeO2	0.99999
oxides	HAFNIUM OXIDE	HfO2	99.9%
oxides	HOLMIUM OXIDE	Ho2O3	99.9%
oxides	INDIUM OXIDE	In2O3	99.99%
oxides	INDIUM TIN OXIDE	In2O3 / SnO2	99.99%
oxides	INDIUM ZINC OXIDE	In2O3 / ZnO	99.99%
oxides	IRON OXIDE	Fe2O3, Fe2O4	99.5- 99.99%
oxides	LANTHANUM OXIDE	La2O3	99.99%
oxides	LEAD TITANATE	PbTiO3	99.9%
oxides	LEAD ZIRCONATE	PbZrO3	99.9%
oxides	LEAD ZIRCONATE TITANATE (PZT)	Pb[ZrxTi1-x]O3	99.9%
oxides	LUTETIUM OXIDE	Lu2O3	99.9%
oxides	MAGNESIUM OXIDE	MgO	99.95%
oxides	MANGANESE OXIDE	MnO, MnO2, Mn2O3	99.9%
oxides	MOLYBDENUM OXIDE	MoO2, MoO3	99.9%
oxides	NEODYMIUM OXIDE	Nd2O3	99.9%
oxides	NICKEL OXIDE	NiO	99.9%
oxides	NIOBIUM OXIDE	Nb2O5	99.95%
oxides	PRASEODYMIUM OXIDE	Pr2O3	99.9%
oxides	SAMARIUM OXIDE	Sm2O3	99.9%
oxides	SCANDIUM OXIDE	Sc2O3	0.99995
oxides	SILICON DIOXIDE	SiO2	0.99995
oxides	SILICON MONOXIDE	SiO	99.9%
oxides	STRONTIUM OXIDE	SrO	99.5%
oxides	STRONTIUM TITANATE	SrTiO3	99.9%
oxides	TANTALUM OXIDE	Ta2O5	99.9%
oxides	TERBIUM OXIDE	Tb2O3	99.9%
oxides	THULIUM OXIDE	Tm2O3	99.9%
oxides	THORIUM OXIDE	ThO2	99.9%
oxides	TIN OXIDE	SnO2	99.9%
oxides	TIN OXIDE - ANTIMONY OXIDE	SnO2 - Sb2O3	99.9%
oxides	TITANIUM OXIDE	TiO2, Ti2O3	99.9%
oxides	TUNGSTEN OXIDE	WO3	99.9%
oxides	VANADIUM OXIDE	V2O5	99.9%
oxides	YTTERBIUM OXIDE	Yb2O3	99.9%
oxides	YTTRIUM OXIDE	Y2O3	99.9%
oxides	ZINC OXIDE	ZnO	99.9, 99.99%
oxides	ZIRCONIUM OXIDE	ZrO2	99.9%
oxides	ZIRCONIUM TITANIUM OXIDE	ZrTiO4	99.9%
oxides	ZIRCONIUM SILICON OXIDE	ZrO2 / SiO2	99.9%
Selenides
selenides	CADMIUM SELENIDE	CdSe	0.99995
selenides	LEAD SELENIDE	PbSe	99.95%
selenides	MOLYBDENUM SELENIDE	MoSe2	99.9%
selenides	NIOBIUM SELENIDE	NbSe2	99.8%
selenides	TANTALUM SELENIDE	TaSe	99.4%
selenides	TUNGSTEN SELENIDE	WSe2	99.8%
selenides	ZINC SELENIDE	ZnSe	99.9%
Silicides
silicides	ALUMINUM SILICIDE	AlSi2	99.5%
silicides	CHROMIUM SILICIDE	CrSi2, Cr3Si	99.5%
silicides	COBALT SILICIDE	CiSi2	99.5%
silicides	HAFNIUM SILICIDE	HfSi2	99.5%
silicides	IRON SILICIDE	FeSi2	99.5%
silicides	MOLYBDENUM SILICIDE	MoSi2	99.5%
silicides	NIOBIUM SILICIDE	NbSi2	99.5%
silicides	TANTALUM SILICIDE	TaSi2, TaSi3	99.5%
silicides	TITANIUM SILICIDE	Ti5Si2, TaSi3	99.9%
silicides	TUNGSTEN SILICIDE	WSi2	99.9%
silicides	VANADIUM SILICIDE	VSi2, V3Si	99.5%
silicides	ZIRCONIUM SILICIDE	ZrSi2	99.5%
Sulfides
sulfides	ARSENIC SULFIDE	As2S3	99.9%
sulfides	CADMIUM SULFIDE	CdS	99.99%
sulfides	INDIUM SULFIDE	In2S3	99.99%
sulfides	LEAD SULFIDE	PbS	99.9%
sulfides	MOLYBDENUM SULFIDE	MoS2	0.99
sulfides	TANTALUM SULFIDE	TaS2	99.9%
sulfides	TUNGSTEN SULFIDE	WS2	99.8%
sulfides	ZINC SULFIDE	ZnS	99.99%
sulfides	ZIRCONIUM SULFIDE	ZrS2	99.9%
Tellurides
tellurides	CADMIUM TELLURIDE	CdTe	99.99%
tellurides	LEAD TELLURIDE	PbTe	99.99%
tellurides	MOLYBDENUM TELLURIDE	MoTe2	99.9%
tellurides	NIOBIUM TELLURIDE	NbTe2	99.8%
tellurides	TANTALUM TELLURIDE	TaTe2	99.8%
tellurides	TUNGSTEN TELLURIDE	WTe2	99.8%
tellurides	ZINC TELLURIDE	ZnTe	99.99%

Sputtering Targets materials and purity table