From Research to Production: Explore 5 RTP/RTA Systems

PhotonExport, a leading representative of vacuum and thin film processing equipment in Spain and Portugal, offers cutting-edge equipment for various applications, including Rapid Thermal Processing (RTP) and Rapid Thermal Annealing (RTA) systems. RTP/RTA, is a semiconductor manufacturing technique that enables swift heating of samples to high temperatures, completing processes within minutes.

Explore 5 RTP/RTA Systems?

RTP/RTA systems offer advanced features and capabilities for various applications. Let’s take a closer look at some models that you can use in your research to production processes.

JETLIGHT 50

JetLight 50 RTP System. Photo: Courtesy of Annealsys.
JetLight 50 RTP System. Photo: Courtesy of Annealsys.

Up to 1000°C

Compact and Cost-Effective Bench-Top Solution for R&D Labs and Small-Scale Production

Versatile, cost-effective, and software-controlled, this bench-top RTP tool is designed for R&D labs and small-scale production.

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JetFirst 200

Jipelec JetFirst 200 system
JetFirst 200. Photo: Courtesy of Annealsys.

Up to 1200°C
R&D

Single Wafer RTP/RTA Furnace

The JetFirst 200 system is an affordable bench top RTP processor. It is the perfect tool for R&D applications from MEMS to SOLAR.

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Annealsys AS-Micro

Annealsys AS-Micro
Annealsys AS-Micro. Photo: Courtesy of Annealsys.

Up to 1250°C

High vacuum capability

Low cost 3 inch Rapid Thermal Processing system

The AS-Micro stands as a compact and versatile table-top system, tailored exclusively for cutting-edge research applications. Embrace its seamless support for substrates, ranging from a few square millimeters up to 3 inches in diameter or square.

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Annealsys AS-One

Annealsys AS-One
Annealsys AS-One. Photo: Courtesy of Annealsys.

4-inch (100 mm) and 6-inch (150 mm) versions available

Rapid Thermal Processing furnaces for RTA and CVD processes

The AS-One System, offers two reactor sizing options to accommodate substrates of up to 100 mm or 150 mm in diameter. Engineered to cater to the demands of research laboratories and small-scale production, this exceptional system guarantees a seamless blend of cost-effectiveness and unparalleled reliability.

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Annealsys AS-Master

Annealsys AS-Master
Annealsys AS-Master. Photo: Courtesy of Annealsys.

Perfect RTP system for production applications

Versatile RTP system

From room temperature up to 1450°C

The Annealsys AS-Master equipment is an ideal Rapid thermal processing system for production applications requiring cassette-to-cassette loading. The AS-Master’s flexibility allows you to execute diverse processes, from annealing to Rapid Thermal Chemical Vapor Deposition (RTCVD), and much more.

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Rapid Thermal Processing (RTP) is a game-changing technology in semiconductor manufacturing, providing rapid heating and cooling for various applications. PhotoExport can provide a wide range of RTP/RTA systems that, researchers and production facilities can take advantage of advanced features, precise temperature control, and enhanced process reproducibility. Whether it’s the compact JetLight 50, the versatile AS-One, or production-focused AS-Master, RTP/RTA systems PhotonExport can offer cutting-edge capabilities to meet specific needs.

Contact us today for your RTP/RTA Equipment quote.