Iron (Fe)
26
55.845
Fe
Iron
Iron is a chemical element with the symbol Fe and atomic number 26. Iron is one of the most abundant elements in the Earth’s crust.
Iron is a transition metal with a silver-gray appearance in its pure form. It is malleable, ductile, and has a relatively high melting point of 1538ºC. Iron exhibits excellent mechanical strength and durability. It has good electrical conductivity and it is magnetic.
In the semiconductor industry, iron is used in various applications, primarily as a component in stainless steel equipment and machinery. Iron-containing alloys are also used in the construction of semiconductor processing chambers, vacuum components, and heating elements.
Iron Materials
Iron (Fe) Evaporation Materials
Our Iron (Fe) Evaporation Materials come in a range of styles such as; chunk, foil, pellet, wire, rod, shot, and slugs styles.
Iron (Fe) Thermal Evaporation
When thermally evaporating iron materials, you can use boats, coils, baskets and crucibles. See thermal evaporation details in the table below.
If you are interested in other sputtering targets materials. Make sure to visit our sputtering target page.
Iron Evaporation Techniques
| Material | Iron † | |
| Purities | 99.9-99.95% | |
| Symbol | Fe | |
| Density | 7.86 | |
| Melting Point (C°) | 1535 | |
| Sublimes / Decompose | – | |
| Acoustic impedance Z Ratio | 0.349 | |
| Temp. (C°) for given Vap press. Tor | 10-8 | 858 |
| 10-6 | 998 | |
| 10-4 | 1180 | |
| E-Beam Evaporation | E-Beam Performance | Excellent |
| Liner Material | Fabmate®‡ | |
| Thermal Evaporation | Boat | W |
| Coil | W | |
| Basket | W | |
| Crucible | Al2O3 | |
| Sputter | DC | |
| Comments | Attacks W. Films hard, smooth. Preheat gently to outgas. | |
Legend
- E-Beam Evaporation = PVD using electron beam to generate vapor
- Thermal Evaporation = PVD using electric heater
- PDC = Pulsed DC (Direct Current) sputtering
- RF = RF(Radio Frequency) sputtering
- RF-R = reactive RF (Radio Frequency) sputter
- DC = DC (Direct Current) sputtering
- DC-R = reactive DC (Direct Current) sputtering
Symbols legend
† : Magnetic material (requires special sputter source)
‡: One run only
* : Influenced by composition
** :The z-ratio is unknown. Therefore, we recommend using 1.00 or an experimentally
determined value.
*** Alumina coating is available
Thermal evaporation accessories materials
C = carbon, Gr = graphite, Q = quartz, VitC = vitreous carbon
Sublimes/Decompose
S = sublimes
D = decomposes
Effective Sputtering Techniques
PDC = Pulsed DC sputtering
RF = RF sputtering
RF-R = Reactive RF sputter
DC = DC sputtering
DC-R = reactive DC sputtering
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