PhotonExport Official Representative in Equipment brands from Spain and Portugal, we have the best machines: PECVD Single Wafer.
Features of Plasma Enhanced Chemical Vapor Deposition (PECVD) Single Wafer
PECVD single wafer equipment has a very strong position in the semiconductor industry due to its ability to deposit a wide variety of thin films.
With strict control of mechanical properties, with the use of a single RF power supply, the tools offer high process reliability.
During the process, minimum levels of impurities are guaranteed thanks to its effective design, with the distribution of gas and temperature, which give the thickness and property of the thin film throughout the substrate.