Boost Your Process with IMM-100 : Unmatched Precision in Thin Film Deposition Monitoring
The IMM-100 is engineered to provide unparalleled precision in monitoring thin film deposition processes. Leveraging ModeLock technology, it offers remarkable reproducibility and uniformity. This monitor guarantees outstanding thickness accuracy, high measurement resolution, and low rate noise, all essential for optimizing the performance of your processes.
Why Choose IMM-100 by INFICON?
- ModeLock Technology: Provides the longest crystal life, ensuring you get the most stable and accurate measurements at any deposition rate.
- Top-Tier Thickness Measurements: Achieve unmatched QCM thickness readings for better process control and enhanced production yields.
- Simple, Cost-Effective Design: A focused, single-channel rate and thickness monitor that eliminates unnecessary features, reducing cost without sacrificing performance.
- Fast, Reliable Measurements: Delivers precise readings with a ±0.0035 Hz accuracy within 100 ms samples.
- EtherCAT Compatibility: Seamlessly integrates into your system through EtherCAT communication, ensuring smooth and efficient data exchange.
- Space-Saving Compact Design: Its small form factor allows for easy integration into your tools, saving valuable real estate and reducing overall costs.
- Comprehensive Support: Our team provides expert consultation and application support, ensuring that your specific needs are met.
- RoHS Compliant: Adheres to industry standards for environmental safety.
IMM-100 Specifications:
- Sensor Inputs: 1
- Frequency Range: 6.0 to 4.5 MHz (fixed)
- Thickness and Rate Resolution:
- 0.0042 Å (new crystal)
- 0.0076 Å (crystal at 4.5 MHz) over 100 ms sample (for material density = 1.0, Z-Ratio = 1.0)
- Communication Type: EtherCAT, two RJ45 jacks, supporting data daisy-chaining with explicit device IDs via switches.
Ideal for Applications in:
- OLED Applications
The IMM-100 is built for industries requiring exceptional accuracy and reliability in thin film deposition monitoring. Whether you’re involved in OLED production, semiconductor manufacturing, or any other high-precision thin film application, the IMM-100 ensures top-notch performance, driving process improvement and efficiency.
IMM-100 Brochure
PDF • 388 KB
Accessories
Part Number
| 785-600-G1 | IMM-100 Thin Film Deposition Monitor |
Accessories
| Part Number | Description |
| Optional Power Supplies | The power supplies listed below are rated for an input of 100 to 249 V (ac), 2 A, 50 to 60 Hz with an output of 24V (dc), 3.34 A, 80 W maximum. |
| 961-021-G1 | Power Supply Kit 80 – 250 VAC / 4 ft (1.2m) US plug |
| 961-021-G2 | Power Supply Kit 80 – 250 VAC / 4 ft (1.2 m) US plug w/ 15 ft (4.5m) Extension Cable |
| 961-021-G3 | Power Supply Kit 80 – 250 VAC / 4 ft (1.2 m) US plug w/ 30 ft (9m) Extension Cable |
| 961-021-G4 | Power Supply Kit 80 – 250 VAC / 4 ft (1.2 m) 230V plug |
| 961-021-G5 | Power Supply Kit 80 – 250 VAC / 4 ft (1.2 m) 230V plug w/ 15 ft (4.5m) Extension Cable |
| 961-021-G6 | Power Supply Kit 80 – 250 VAC / 4 ft (1.2 m) 230V plug w/ 30 ft (9m) Extension Cable |
| 961-021-G7 | Power Supply Kit IL 240V |
| 961-021-G8 | Power Supply Kit IL 4.5 M Extension |
| 961-021-G9 | Power Supply Kit IL 9.0 M Extension |
| 961-021-G10 | Power Supply Kit UK 240V |
| 961-021-G11 | Power Supply Kit UK 4.5 M Extension |
| 961-021-G12 | Power Supply Kit UK 9.0 M Extension |
| Optional Mounting Bracket | |
| 785-202-G1 | Mounting bracket with four clean room compatible shock absorbing, female-to-female, stainless steel mounting feet |
| 785-201-G1 | Mounting bracket with four shock absorbing, male-to-female, black Neoprene rubber mounting feet |
| Optional Mounting Bracket | |
| 600-1190-P1 | ETHERNET COMUNICATION CABLE 1 METER |
| 785-201-G1 | Mounting bracket with four shock absorbing, male-to-female, black Neoprene rubber mounting feet |
| Optional Communications Cable | |
| 600-1190-P1 | ETHERNET COMUNICATION CABLE 1 METER |
| 600-1190-P2 | SPEC- ETHERNET COMMUNICATION CABLE .3M |
| 600-1190-P4 | ETHERNET COMUNICATION CABLES 4.3 METER |
| 600-1190-P8 | Ethernet 7m cable |
| 600-1190-P15 | Ethernet 15m cable |
Consumables
For detailed pricing or to learn more about how the IMM-100 can benefit your specific needs, feel free to reach out to us.