The IMM-200 is an advanced thin film deposition monitor designed to deliver unmatched precision and reliability. Built with INFICON’s ModeLock technology, it maximizes reproducibility and uniformity while providing high-resolution measurements, superior thickness accuracy, and minimal rate noise.
With a built-in oscillator, the IMM-200 seamlessly integrates into Ethernet-based systems, requiring minimal hardware and footprint. Its compact yet powerful design ensures optimal performance for various industrial and research applications.
Features
- ModeLock Technology – Ensures the longest crystal life and most stable, high-resolution rate and thickness measurements, even at very low deposition rates.
- Maximum Yield & Precision – Provides the best QCM (Quartz Crystal Microbalance) thickness measurement, improving process efficiency and product quality.
- Cost-Effective & Efficient – A single-channel monitor with a streamlined design, eliminating unnecessary features to reduce costs while maintaining high-performance monitoring.
- High Measurement Accuracy – Achieves ±0.0035 Hz stability over 100 ms sample time, ensuring ultra-precise control over thin film deposition.
- Ethernet Connectivity – Allows for seamless integration with modern manufacturing systems, enhancing process automation and control.
- Compact & Space-Saving – The IMM-200’s compact design minimizes integration costs and optimizes workspace usage, making it ideal for high-tech fabrication environments.
- Expert Application Support – Our team provides specialized support, catering to unique application needs and offering industry-leading expertise.
- RoHS Compliant – Manufactured to meet strict environmental and safety standards, ensuring sustainable and responsible production.
IMM-200 Specifications
- Sensor Inputs: 1
- Measurement frequency range: 6.0 to 4.5 MHz (fixed)
- Rate and thickness resolution:
0.0042 Å (new crystal)
0.0076 Å (crystal @ 4.5 MHz) over 100 ms sample for material density = 1.0, Z-Ratio = 1.0 - Communication Type: Ethernet, 1 RJ45 jack
Ideal for Applications in:
- Semiconductor Manufacturing
- OLED Applications
The IMM-200 is the perfect high-precision deposition monitoring solution, providing unparalleled accuracy, efficiency, and control for advanced manufacturing processes.
IMM-200 Operating Manual (English)
PDF • 5 MB
IMM-200 Brochure
PDF • 376 KB
PDMAT SemiQCM Datasheet
PDF • 1 MB
For detailed pricing or to learn more about how the IMM-200 can benefit your specific needs, feel free to reach out to us.