Optimize Semiconductor Processes with SemiQCM™ CR Sensor
The SemiQCM™ CR sensor is a highly durable, chemically inert solution designed for CVD and ALD chambers, even in the most demanding conditions. As part of a comprehensive precursor monitoring system, it integrates seamlessly with the IMM-200 and FabGuard (version 19.12.00-a or higher) to ensure precise process control and enhanced operational efficiency.
Optimized Semiconductor Process Monitoring
With real-time precursor tracking, SemiQCM CR enhances semiconductor applications by enabling end-point detection and fault prevention. By continuously monitoring precursor levels in the foreline or chamber exhaust, it ensures a cost-effective approach to process stability and optimization.
Immediate Precursor Delivery Detection
The system’s high sensitivity allows for the rapid identification of precursor delivery failures, detecting issues as early as a single wafer, minimizing waste and maximizing process efficiency.
Features
- High-Frequency Monitoring: QCM data is captured at 10Hz, ensuring rapid and reliable measurements.
- Intelligent Data Correlation: FabGuard synchronizes QCM data with tool states and process steps for precise analysis.
- Superior Measurement Accuracy: Enables high-precision tracking of deposition and etch rates.
- Sub-Monolayer Sensitivity: Detects ultra-thin layer changes with exceptional accuracy.
Benefits
- Real-Time, In-Situ Monitoring: Provides continuous oversight of the process environment.
- Over-Etching Prevention: Detects and prevents excessive material removal, optimizing yield.
- Fault Detection & Diagnosis: Identifies equipment or process state anomalies for proactive maintenance.
Common Applications:
• Semiconductor Manufacturing
SemiQCM™ CR Sensors Specifications:
| Maximum Temperature | 200°C |
| Sensor head Size (Maximum envelope) | 15 mm O.D. x 39.2 mm (0.59 in. O.D. x 1.54 in.) |
| MATERIALS | |
| SemiQCM CR Body and Holder | 6061 Aluminum |
| SemiQCM CR Springs | Beryllium Nickel |
| SemiQCM CR Nut and Conductor Tube | Inconel 625 |
| SemiQCM CR Other Mechanical Parts | Nickel 200, Aluminum, or Inconel 625 |
| Insulators | >99% Al2O3 in vacuum: Teflon® used elsewhere |
| Wire | 1. Ni (in vacuum) 2. Ni plated Cu (elsewhere) |
For Full Specifications
PDF • 48 MB
Consumables
| Part Number | Description |
| 750-7053-G1S | 8 mm CR Crystal Holder Assembly with Alloy Crystal Installed |
| 750-7053-G2S | 8 mm CR Crystal Holder Assembly with Alumina Crystal Installed |
| 750-7053-G3S | 8 mm CR Crystal Holder Assembly with Yttria Crystal Installed |
| 750-7055-G1S | Crystal Holder, Finger Spring, and Retainer Spring Spare Assembly |
| 750-1089-G10 | SENSOR CRYSALS, 6 MHZ, ALLOY, 8 mm, 10 crystals |
| 750-1127-G5 | SENSOR CRYSTALS, 6 MHz, ALUMINA, 8 mm, 5 crystals |
| 750-1128-G5 | SENSOR CRYSALS, 6 MHZ, YTTRIA, 8 mm, 5 crystals |
Spare Parts
| Part Number | Description |
| 750-7055-G1S | Crystal Holder, Finger Spring, and Retainer Spring Spare Assembly |
For detailed pricing or to learn more about how the SemiQCM™ CR can benefit your specific needs, feel free to reach out to us.