Enhance Your Semiconductor Processes with SemiQCM™ SR Sensors for Precise Precursor Monitoring
The SemiQCM™ SR sensor is a critical part of a system designed for accurate precursor monitoring, working in conjunction with the IMM-200 and FabGuard (version 19.12.00-a or higher).
By leveraging in-situ QCM technology, this monitoring solution offers a cost-effective way to track semiconductor processes, ensuring better control over precursor delivery in the foreline or chamber exhaust. It provides significant value by detecting precursor delivery failures after only one wafer, leading to improved process efficiency and profitability.
Features
- Monitors QCM data at a rate of 10Hz
- FabGuard seamlessly correlates QCM data with tool status and process stages
- Highly accurate measurement of deposition or etch rates
- Sensitivity and precision for measuring sub-monolayer thickness
Benefits
- Real-time, in-situ process monitoring for immediate process adjustments
- Prevents over-etching and helps identify the end point for chamber cleaning
- Identifies equipment or process faults early to minimize disruptions
Common Applications:
• Semiconductor Manufacturing
This cutting-edge monitoring system ensures exceptional accuracy, flexibility, and reliability in thin film deposition applications, making it an ideal choice for research and industrial use.
SemiQCM™ SR Sensors Specifications:
| Maximum Temperature | 200°C |
| Sensor head Size (Maximum envelope) | 23.87 mm O.D. x 29.19 mm (0.94 in. O.D. x 1.15 in.) |
| MATERIALS | |
| Body and Holder | 304 stainless steel |
| Springs | Au plated BeCu |
| Coaxial Line | 5 mm (1.88 in.) O.D. stainless steel |
| Other Mechanical Parts | 18-8 or 304 stainless steel, Hastelloy® c276 |
| Insulators | >99% Al2O3 in vacuum: Teflon® used elsewhere |
| Wire | 1. Ni (in vacuum) 2. Ni plated Cu (elsewhere) |
| Braze | Vacuum process high temperature NiCr alloy |
| Crystal | 18-8 or 304 stainless steel, Hastelloy® c276 |
PDMAT SemiQCM Datasheet
PDF • 997,3 KB
SemiQCM for TDMAT Dimensions
PDF • 199,9 KB
TDMAT Precursor Monitoring with a Quartz Crystal Microbalance Application Note
PDF • 1,3 MB
For detailed pricing or to learn more about how the SemiQCM™ SR can benefit your specific needs, feel free to reach out to us.