SQM-160: Advanced Thin Film Deposition Monitoring
The SQM-160 utilizes INFICON’s advanced quartz crystal sensor technology to deliver precise rate and thickness measurements in thin film deposition processes. Designed for flexibility, it includes two standard sensor inputs, with the option to expand up to six for enhanced monitoring capabilities. Additionally, two analog recorder outputs provide real-time rate and thickness data.
Enhanced Sensor Configuration
SQM-160 allows users to assign sensor inputs to different materials, average multiple inputs for improved deposition control in large-scale systems, or configure a dual-sensor setup. The rate sampling mode extends sensor lifespan by utilizing a shuttered sensor in high-rate deposition environments. Users can also select between 0.1Å/s or 0.01Å/s rate displays for optimized precision.
Customizable Monitoring and Control
Beyond rate and thickness measurements, the SQM-160 offers Frequency and Mass display options to suit different monitoring needs. Equipped with four relay outputs, the device seamlessly controls source and sensor shutters, triggers thickness and time setpoints, and detects crystal failures. Digital inputs enable external signals to start, stop, and reset readings, adding further control flexibility.
Features
- Dual-channel measurement (expandable to six)
- Analog outputs for real-time rate/thickness recording
- High-resolution option: 0.03Hz at 10 readings/sec
- Standard RS-232 interface with optional USB or Ethernet connectivity
This cutting-edge monitoring system ensures exceptional accuracy, flexibility, and reliability in thin film deposition applications, making it an ideal choice for research and industrial use.
SQM-160 Standard Resolution
- QCM Sensor Inputs: Standard: 2; optional: 4
- Measurement Frequency Range: Adjustable:
1.0 MHz minimum
6.5 MHz maximum - Thickness and rate resolution/measurement (1): ± 0.37 Å
- Stored Films: 99
- Digital Inputs/Outputs: Four inputs, four relay outputs
SQM-160 High Resolution
- QCM Sensor Inputs: Standard: 2; optional: 4
- Measurement Frequency Range: Adjustable:
1.0 MHz minimum
6.5 MHz maximum - Thickness and rate resolution/measurement (1): ± 0.037 Å
- Stored Films: 99
- Digital Inputs/Outputs: Four inputs, four relay outputs
(1)Tooling/density = 100/1, fundamental frequency = 6 MHz, 0.10 s measurement interval
Accessories
Accessories
| Front Load Single Sensor |
| Front Load Dual Sensor |
| Cool Drawer Single Sensor |
| Cool Drawer Dual Sensor |
| Easy Rate Single Sensor |
| Easy Rate Dual Sensor |
| UHV Bakeable Sensor |
| Sputtering Sensor |
Consumables
Replacement Parts
| Part Number | Description |
| 782-900-014 | 19 in. Rack Mount Kit for two SQM-160 or CI-100 instruments |
| 782-502-096-G1 | USB option card |
| 782-502-097-G1 | Ethernet option card |
| Oscillator kits | (Includes oscillator and cables) |
| 783-500-109-10 | 3 m (10 ft.) Oscillator Kit – includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 3 m (10 ft.) BNC cable |
| 783-500-109-25 | 7.6 m (25 ft.) Oscillator Kit – includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 7.6 m (25 ft.) BNC cable |
| 783-500-109-50 | 15.2 m (50 ft.) Oscillator Kit – includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 15.2 m (50 ft.) BNC cable |
| 783-500-109-75 | 22.8 m (75 ft.) Oscillator Kit – includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 22.8 m (75 ft.) BNC cable |
| Oscillator Only | (No cables included) |
| 783-500-013-G1 | OSC-100 oscillator only (no cables) |
| Cables | |
| 782-902-011 | 15.2 cm (6 in.) BNC cable, male/female |
| 782-902-012-10 | 3 m (10 ft.) BNC cable, male/male |
| 782-902-012-25 | 25 7.6 m (25 ft.) BNC cable, male/male |
| 782-902-012-50 | 15.2 m (50 ft.) BNC cable, male/male |
| 782-902-012-75 | 22.8 m (75 ft.) BNC cable, male/male |
Downloads
Brochures
Manuals
SQM-160 Multi-Film Rate / Thickness Monitor
PDF • 642 KB
SQM-160 Multi-Film Rate / Thickness Monitor Operating Manual
PDF • 5,2 MB
3D Step Files
SQM-160-H-6-U – SQM Deposition Monitor
STP • 5,7 MB • 3D FILES
Part Number
SQM-160
PNG • 127,0 KB
Others
SQM-160 Comm Software V1.14(Windows)
ZIP • 5,0 MB • ENGLISH
SQM-160 LabVIEW™ Example
ZIP • 117,4 KB • ENGLISH
SQM-160 V2 Software v2.9.0 (Windows)
EXE • 15,8 MB • ENGLISH
USB Installer v1.8.0
EXE • 14,3 MB • ENGLISH • SOFTWARE
For detailed pricing or to learn more about how the SQM-160 can benefit your specific needs, feel free to reach out to us.