PVD Cluster Solutions

PhotonExport Official Representative in Equipment brands from Spain and Portugal, we have the best machines: PVD cluster– Load Lock Robot Loading

FEATURES OF PVD Cluster – LOAD LOCK ROBOT LOADING

Vacuum evaporation is a typical method used for deposition of functional films on to various substrates. The particles that have evaporated are deposited on the substrate where they condense back to solid state. These range of machines are developed for both R&D and batch production and are easily adapted to substrate size, shape and specifications.

The CT200 is one of the most advanced cluster tools of its generation. Versatile and scalable equipment intended to be installed in a clean room, this PVD cluster is based on a central transfer chamber equipped with a reliable and safe vacuum robot design.

From this chamber, the substrates are distributed to the different process modules. This machine can be made up of different modules up to 6, around a transfer chamber.

The PVD Cluster – Load Lock Robot Loading is one of the most advanced clustertools of its generation, it is the ultimate tool for thin film deposition.

A versatile and scalable Large Equipment intended to be installed in a clean room, this PVD cluster is based on a central transfer chamber equipped with a reliable and safe vacuum robot of our design. From this chamber, the substrates are distributed to the different process modules. This machine can be made up of different modules, up to 6, around a transfer chamber.