Explore 5 RTP/RTA Systems
PhotonExport, a leading representative of vacuum and thin film processing equipment in Spain and Portugal, offers cutting-edge equipment for various applications, including Rapid Thermal Processing (RTP) and Rapid Thermal Annealing (RTA) systems. RTP/RTA, is a semiconductor manufacturing technique that enables swift heating of samples to high temperatures, completing processes within minutes.
What is Rapid Thermal Processing (RTP)?
Rapid Thermal Processing (RTP) is a semiconductor manufacturing technique designed to quickly heat silicon wafers to high temperatures within seconds for heat treatment. This process is crucial for restoring or enhancing the performance, functionality, properties, or structure of semiconductor devices. The rapid heating is accomplished using high-intensity lamps, such as tungsten halogen lamps or lasers. To ensure precise temperature control and avoid overheating or underheating, thermocouples and pyrometers are used for temperature measurements. The process involves temperatures ranging from 200°C to over 1300°C, with ramp rates typically between 20 and 200°C per second.
What are some RTP Systems?
Explore 5 RTP/RTA Systems below:
RTP/RTA systems offer advanced features and capabilities for various applications. Let’s take a closer look at some models that you can use in your research to production processes.
What is the JETLIGHT 50 RTP System?
Jetlight 50
Photo: Courtesy of Annealsys.
The JetLight 50 RTP System is a versatile, compact, and cost-effective bench-top solution designed for R&D labs and small-scale production, capable of reaching temperatures up to 1000°C. This software-controlled tool provides an efficient and flexible option for various applications, making it an ideal choice for both research and development settings and limited-scale manufacturing processes.
What is the JetFirst 200 RTP System?
JetFirst 200
Photo: Courtesy of Annealsys.
The JetFirst 200 is an affordable bench-top RTP processor designed for R&D applications, capable of reaching temperatures up to 1200°C. This single wafer RTP/RTA furnace is ideal for a variety of research and development needs, ranging from MEMS to solar technologies.
What is the ANNEALSYS AS-MICRO RTP System?
ANNEALSYS AS-MICRO
Photo: Courtesy of Annealsys.
The ANNEALSYS AS-MICRO is a low-cost, compact, and versatile table-top Rapid Thermal Processing system capable of reaching up to 1250°C with high vacuum capability. Designed exclusively for cutting-edge research applications, it supports substrates ranging from a few square millimeters up to 3 inches in diameter or square. (Photo: Courtesy of Annealsys.)
What is the Annealsys AS-ONE System?
ANNEALSYS AS-ONE
Photo: Courtesy of Annealsys.
The AS-One System offers Rapid Thermal Processing furnaces for RTA and CVD processes, with 4-inch (100 mm) and 6-inch (150 mm) versions available to accommodate substrates up to 150 mm in diameter. Engineered to meet the demands of research laboratories and small-scale production, this system provides a seamless blend of cost-effectiveness and unparalleled reliability.
What is the AS-MASTER RTP System?
ANNEALSYS AS-MASTER
Photo: Courtesy of Annealsys.
The ANNEALSYS AS-MASTER is a versatile RTP system ideal for production applications, capable of reaching temperatures from room temperature up to 1450°C. Designed for cassette-to-cassette loading, this system excels in various processes, including annealing and Rapid Thermal Chemical Vapor Deposition (RTCVD), making it a highly flexible solution for diverse production needs.
Where can I find RTP/RTA Equipment?
Rapid Thermal Processing (RTP) is a game-changing technology in semiconductor manufacturing, providing rapid heating and cooling for various applications. PhotoExport can provide a wide range of RTP/RTA systems that, researchers and production facilities can take advantage of advanced features, precise temperature control, and enhanced process reproducibility. Whether it’s the compact JetLight 50, the versatile AS-One, or production-focused AS-Master, RTP/RTA systems PhotonExport can offer cutting-edge capabilities to meet specific needs.
Contact PhotonExport today for your RTP/RTA Equipment quote.