Thin Film Rate and Thickness Monitors – High Precision and Reliable Solutions

Discover a selection of high-precision thin film rate and thickness monitors, designed for exceptional accuracy, reliability, and process control in thin film deposition applications. We offer advanced models such as IMM-100, IMM-200, SQM-160, and STM-2, which are known for their superior performance in both industrial and research environments. Featuring USB connectivity, ModeLock technology, and real-time monitoring, these solutions enhance efficiency across various deposition processes.

Thin film deposition plays a crucial role in industries like semiconductor manufacturing, solar panel production, and precision optics. Achieving accurate measurements and consistent results is essential for process optimization. Monitors such as IMM-100, IMM-200, and SQM-160 ensure precise control over film thickness and deposition rates, improving overall quality and efficiency. Meanwhile, compact models like the STM-2 save space while maintaining high-accuracy performance.

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Additionally, SemiQCM™ SR and SemiQCM™ CR sensors, integrated with precursor monitoring technology, provide advanced deposition tracking. The SemiQCM™ SR sensor enables accurate and reliable precursor measurement for better process control, while the SemiQCM™ CR sensor offers real-time monitoring, preventing over-etching and optimizing cleaning processes.

These advanced monitors help track film deposition variations, ensuring consistent quality and reducing errors. ModeLock technology minimizes noise and enhances measurement accuracy, while real-time data feedback enables operators to make immediate adjustments, preventing costly production inefficiencies.

Our selection of thin film monitoring solutions is ideal for large-scale systems and applications requiring precise sensor control. Whether optimizing precursor monitoring, etching prevention, or thin film deposition, these monitors deliver the accuracy and reliability required for high-quality, efficient processes.

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Why Choose Our Thin Film Monitors?

  • High Precision: Our monitors ensure accurate measurements of film thickness and rate, essential for achieving quality results.
  • Real-time Monitoring: With real-time data feedback, processes can be controlled more efficiently, minimizing waste and increasing productivity.
  • Flexible Applications: Perfect for use in various industries such as semiconductor manufacturing, solar panel production, and research laboratories.
  • Cutting-edge Technology: Features like ModeLock technology and precursor monitoring sensors provide unparalleled performance and reliability.

Browse our range of products to find the ideal thin film monitor for your application. Whether you’re managing large systems or smaller setups, we offer solutions tailored to meet your needs. Optimize your processes with the latest in thin film monitoring technology.

Monitors

IMM-100

Monitors
IMM-100

The IMM-100 is designed for precise and consistent thin film deposition monitoring. Utilizing ModeLock technology, it ensures optimal reproducibility, accuracy, and minimal noise for a wide range of materials and deposition processes.

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IMM-200

Monitors
IMM-200

A high-precision deposition monitor equipped with ModeLock technology, designed to enhance reproducibility and uniformity. It offers outstanding thickness accuracy, superior measurement resolution, and minimal rate noise, making it ideal for advanced thin-film applications where consistency and precision are critical.

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SQM-160

Monitors
SQM-160

A versatile multi-film rate and thickness monitor, designed with averaged sensor control for large-scale systems. It supports multiple sensor inputs for monitoring different materials, ensuring high accuracy and flexibility in complex deposition processes. Ideal for industries requiring precise monitoring of diverse thin-film applications.

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STM-2

Monitors
STM-2

Integrates the convenience of USB connectivity with the precision of a high-performance measurement system, all within a compact and affordable design. This combination makes the STM-2 an ideal choice for applications that require both ease of use and accurate measurements at a cost-effective price point.

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SemiQCM™ SR Sensors

Monitors
SemiQCM™ SR

The SemiQCM™ SR sensor is a key part of a precursor monitoring system, working alongside other components such as the IMM-200 and FabGuard (version 19.12.00-a or newer). This sensor is designed to ensure precise and reliable monitoring of precursor materials in advanced processes.

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SemiQCM™ CR Sensors Monitors

Monitors
SemiQCM™ CR

Offers real-time, in-situ process monitoring to prevent over-etching and precisely detect the chamber clean endpoint. This sensor enhances process efficiency and accuracy, ensuring optimal performance and minimizing errors in critical applications.

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